Gallium Nitride as an Electromechanical Material

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2014
Source ID
10.1109/jmems.2014.2352617

Entities

People

  • Azadeh Ansari
  • Didier Theron
  • Lionel Buchaillot
  • Marc Faucher
  • Mina Rais-zadeh
  • Vikrant Jayant Gokhale
  • Yvon Cordier

Organizations

  • Agence Nationale de la Recherche
  • National Science Foundation
  • United States Army Research Laboratory

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems