Batch Mode Microultrasonic Machining ( $\boldsymbol \mu $ USM) Using Workpiece Vibration

Document Details

Document Type: Pub Defense Publication
Publication Date: Feb 01, 2015
Source ID: 10.1109/jmems.2014.2364261

Entities

People

Anupam Viswanath
Tao Li
Yogesh Gianchandani

Organizations

Defense Advanced Research Projects Agency
University of Michigan