Demonstration of 1 Million $Q$ -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2015
Source ID
10.1109/jmems.2014.2365113

Entities

People

  • Andrei M. Shkel
  • Doruk Senkal
  • Mohammad H. Asadian Ardakani
  • Mohammed J. Ahamed
  • Sina Askari

Organizations

  • Defense Advanced Research Projects Agency