Anchor Losses in AlN Contour Mode Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1109/jmems.2014.2367418

Entities

People

  • Attilio Frangi
  • Cristian Cassella
  • Gianluca Piazza
  • Jeronimo Segovia-Fernandez
  • Massimiliano Cremonesi