Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1109/jmems.2014.2374451

Entities

People

  • Chae Hyuck Ahn
  • Eldwin Jiaqiang Ng
  • Shasha Wang
  • Shirin Ghaffari
  • Thomas W. Kenny
  • Vu A. Hong
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation