Design and Fabrication of S0 Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1109/jmems.2014.2384916

Entities

People

  • Kushal Bhattacharjee
  • Renyuan Wang
  • Sunil A. Bhave

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation