Role of Microstructure and Doping on the Mechanical Strength and Toughness of Polysilicon Thin Films

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2015
Source ID
10.1109/jmems.2015.2410215

Entities

People

  • Brad L. Boyce
  • Ioannis Chasiotis
  • Sivakumar Yagnamurthy

Organizations

  • Air Force Office of Scientific Research