Theory and Design of Phononic Crystals for Unreleased CMOS-MEMS Resonant Body Transistors

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2015
Source ID
10.1109/jmems.2015.2418789

Entities

People

  • Bichoy Bahr
  • Dana Weinstein
  • Radhika Marathe

Organizations

  • Defense Advanced Research Projects Agency