Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2015
Source ID
10.1109/jmems.2015.2423663

Entities

People

  • Bo Woon Soon
  • Cristian Cassella
  • Gianluca Piazza
  • Navab Singh

Organizations

  • Air Force Research Laboratory