A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2015
Source ID
10.1109/jmems.2015.2426699

Entities

People

  • Seungdo An
  • Yogesh B. Gianchandani
  • Yutao Qin

Organizations

  • Defense Advanced Research Projects Agency
  • Defense Threat Reduction Agency