A Fully Integrated Oven Controlled Microelectromechanical Oscillator—Part I: Design and Fabrication

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2015
Source ID
10.1109/jmems.2015.2441037

Entities

People

  • Kenneth E. Wojciechowski
  • Michael S. Baker
  • Peggy J. Clews
  • Roy H. Olsson

Organizations

  • Defense Advanced Research Projects Agency
  • Rockwell Collins
  • Sandia National Laboratories

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems