A Fully Integrated Oven Controlled Microelectromechanical Oscillator—Part I: Design and Fabrication
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2015
- Source ID
- 10.1109/jmems.2015.2441037
Entities
People
- Kenneth E. Wojciechowski
- Michael S. Baker
- Peggy J. Clews
- Roy H. Olsson
Organizations
- Defense Advanced Research Projects Agency
- Rockwell Collins
- Sandia National Laboratories