Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2015
Source ID
10.1109/jmems.2015.2442596

Entities

People

  • Alexander A. Trusov
  • Andrei M. Shkel
  • Doruk Senkal
  • Mohammed J. Ahamed

Organizations

  • Defense Advanced Research Projects Agency