Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2015
Source ID
10.1109/jmems.2015.2451191

Entities

People

  • Bo Woon Soon
  • Chae Hyuck Ahn
  • Chengkuo Lee
  • Eldwin J. Ng
  • Thomas W. Kenny
  • Vu A. Hong
  • You Qian
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency
  • Ministry of Education
  • National Research Foundation
  • National Science Foundation Directorate of Computer and Information Science and Engineering