Ultraviolet-Assisted Release of Microelectromechanical Systems From Polyimide Sacrificial Layer

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2015
Source ID
10.1109/jmems.2015.2463096

Entities

People

  • Imen Rezadad
  • Javaneh Boroumand Azad
  • Justin W. Cleary
  • Kurt Eyink
  • Robert E. Peale

Organizations

  • Air Force Office of Scientific Research

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems