Reconfigurable Piezoelectric MEMS Resonator Using Phase Change Material Programmable Vias
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2015
- Source ID
- 10.1109/jmems.2015.2478710
Entities
People
- Gwendolyn Hummel
- Hui Yu
- Matteo Rinaldi