Quality Factor in Polycrystalline Diamond Micromechanical Flexural Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2015
Source ID
10.1109/jmems.2015.2478802

Entities

People

  • Amir Heidari
  • Chen Yang
  • David A. Horsley
  • Hadi Najar
  • Liwei Lin

Organizations

  • Defense Advanced Research Projects Agency