Quality Factor in Polycrystalline Diamond Micromechanical Flexural Resonators
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2015
- Source ID
- 10.1109/jmems.2015.2478802
Entities
People
- Amir Heidari
- Chen Yang
- David A. Horsley
- Hadi Najar
- Liwei Lin
Organizations
- Defense Advanced Research Projects Agency