Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethylsiloxane Membranes

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2015
Source ID
10.1109/jmems.2015.2480388

Entities

People

  • Dongzhi Guo
  • Gary K. Fedder
  • Jinsheng Gao
  • Suresh Santhanam

Organizations

  • Defense Advanced Research Projects Agency