Investigation Into the Quality Factor of Piezoelectric-on-Silica Micromachined Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2015
Source ID
10.1109/jmems.2015.2481362

Entities

People

  • Adam Peczalski
  • Mina Rais-zadeh
  • Roozbeh Tabrizian
  • Zhengzheng Wu

Organizations

  • Defense Advanced Research Projects Agency
  • Goddard Space Flight Center