Stable Encapsulated Charge-Biased Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2016
Source ID
10.1109/jmems.2015.2483365

Entities

People

  • Chae Hyuck Ahn
  • Eldwin J. Ng
  • Kimberly L. Harrison
  • Roger T. Howe
  • Thomas W. Kenny
  • Vu A. Hong
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • Stanford University