Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 01, 2016
- Source ID
- 10.1109/jmems.2016.2525008
Entities
People
- Chae Hyuck Ahn
- David B. Heinz
- Eldwin J. Ng
- Thomas W. Kenny
- Vu A. Hong
- Yushi Yang
Organizations
- Defense Advanced Research Projects Agency
- National Science Foundation