Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2016
Source ID
10.1109/jmems.2016.2529296

Entities

People

  • Mark I. Dykman
  • Pavel Polunin
  • Steven W. Shaw
  • Thomas W. Kenny
  • Yushi Yang

Organizations

  • Army Research Office
  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • National Science Foundation Directorate for Engineering