A Unified Epi-Seal Process for Fabrication of High-Stability Microelectromechanical Devices
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 01, 2016
- Source ID
- 10.1109/jmems.2016.2537829
Entities
People
- Eldwin J. Ng
- Ian B. Flader
- Thomas W. Kenny
- Yunhan Chen
- Yushi Yang
Organizations
- Defense Advanced Research Projects Agency