Harnessing Mode Conversion for Spurious Mode Suppression in AlN Laterally Vibrating Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2016
Source ID
10.1109/jmems.2016.2543523

Entities

People

  • Anming Gao
  • Songbin Gong

Organizations

  • Defense Advanced Research Projects Agency