Polysilicon Thin Film Developed on Flexible Polyimide for Biomedical Applications
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 01, 2016
- Source ID
- 10.1109/jmems.2016.2554358
Entities
People
- Chong Ahn
- Chunyan Li
- Jed A Hartings
- Raj Narayan
- Zhizhen Wu
Organizations
- United States Department of Defense