Pushing the Limits of Bonded Multi-Wafer Stack Heights While Maintaining High Precision Alignment

Document Details

Document Type: Pub Defense Publication
Publication Date: Aug 01, 2016
Source ID: 10.1109/jmems.2016.2574850

Entities

People

Alireza Narimannezhad
Joshah Jennings
Kelvin G Lynn
Marc H. Weber

Organizations

Office of Naval Research Global
United States Army Research Laboratory