Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2016
Source ID
10.1109/jmems.2016.2586099

Entities

People

  • Eldwin J. Ng
  • Ian B. Flader
  • Mark I. Dykman
  • Pavel Polunin
  • Steven W. Shaw
  • Thomas W. Kenny
  • Yunhan Chen
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation