Comb Drive Designs With Minimized Levitation

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2016
Source ID
10.1109/jmems.2016.2614965

Entities

People

  • D. J. Bishop
  • Hernan Pastoriza
  • Matthias Imboden
  • Pablo G. del Corro

Organizations

  • Fondo para la Investigación Científica y Tecnológica