Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducers With Through-Glass-Via Interconnects Using Anodic Bonding

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2017
Source ID
10.1109/jmems.2016.2630851

Entities

People

  • Feysel Yalçın Yamaner
  • Omer Oralkan
  • Xiao Zhang

Organizations

  • Defense Advanced Research Projects Agency
  • National Institutes of Health
  • National Science Foundation