The Impact of Damping on Flicker Frequency Noise of AlN Piezoelectric MEMS Resonators
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 01, 2017
- Source ID
- 10.1109/jmems.2017.2653938
Entities
People
- Gianluca Piazza
- Hoe Joon Kim
- Jeronimo Segovia-Fernandez