The Impact of Damping on Flicker Frequency Noise of AlN Piezoelectric MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2017
Source ID
10.1109/jmems.2017.2653938

Entities

People

  • Gianluca Piazza
  • Hoe Joon Kim
  • Jeronimo Segovia-Fernandez