Tailored Etch Profiles for Wafer-Level Frequency Tuning of Axisymmetric Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2017
Source ID
10.1109/jmems.2017.2667582

Entities

People

  • Amir H. Behbahani
  • Dennis S Kim
  • Jeffrey Denatale
  • Philip Stupar
  • Robert T. M'closkey

Organizations

  • Defense Advanced Research Projects Agency