Simulation of Blowtorch Reflow of Fused Silica Micro-Shell Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2017
Source ID
10.1109/jmems.2017.2693291

Entities

People

  • Ali Darvishian
  • Behrouz Shiari
  • Jae Yoong Cho
  • Khalil Najafi
  • Tal Nagourney