Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2017
Source ID
10.1109/jmems.2017.2744260

Entities

People

  • Diego Emilio Serrano
  • Farrokh Ayazi
  • Yaesuk Jeong

Organizations

  • Defense Advanced Research Projects Agency