MEMS Industry-Worth Etching to Fabricate Tapered Structures in SiO2

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2017
Source ID
10.1109/jmems.2017.2755046

Entities

People

  • Bin Li
  • Huamao Lin
  • Jae Wung Lee
  • Vladimir Bliznetsov

Organizations

  • Sandia National Laboratories