Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2017
Source ID
10.1109/jmems.2017.2758388

Entities

People

  • Chae Hyuck Ahn
  • Dongsuk D. Shin
  • Ian B. Flader
  • Janna Rodriguez
  • Thomas W. Kenny
  • Yunhan Chen

Organizations

  • Defense Advanced Research Projects Agency