Hysteresis-Based Mechanical State Programming of MEMS Mirrors

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2018
Source ID
10.1109/jmems.2018.2807482

Entities

People

  • David L. Torres
  • Jun Zhang
  • Nelson Sepúlveda
  • Sarah Dooley
  • Xiaobo Tan

Organizations

  • Michigan State University
  • National Science Foundation
  • United States Department of Defense