Investigation of Electromechanical Coupling and Quality Factor of X-Cut Lithium Niobate Laterally Vibrating Resonators Operating Around 400 MHz

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2018
Source ID
10.1109/jmems.2018.2817842

Entities

People

  • Abhay Kochhar
  • Flavius Pop
  • Gabriel Vidal-Álvarez
  • Gianluca Piazza

Organizations

  • Defense Advanced Research Projects Agency

Tags

Technology Areas

  • Microelectronics