X-Cut Lithium Niobate Laterally Vibrating MEMS Resonator With Figure of Merit of 1560

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2018
Source ID
10.1109/jmems.2018.2847310

Entities

People

  • Abhay Kochhar
  • Gabriel Vidal-Álvarez
  • Gianluca Piazza
  • Luca Colombo

Organizations

  • Defense Advanced Research Projects Agency