Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2018
Source ID
10.1109/jmems.2018.2859958

Entities

People

  • David B. Heinz
  • Dustin D. Gerrard
  • Grant M. Glaze
  • Ian B. Flader
  • Janna Rodriguez
  • Saurabh Chandorkar
  • Thomas W. Kenny
  • Yunhan Chen

Organizations

  • Defense Advanced Research Projects Agency