A Large Range of Motion 3D MEMS Scanner With Five Degrees of Freedom

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2019
Source ID
10.1109/jmems.2018.2886653

Entities

People

  • Alexander Stange
  • Corey Pollock
  • D. J. Bishop
  • Jeremy B Reeves
  • Lawrence Barrett
  • Matthias Imboden
  • Richard Lally
  • Thomas Stark

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation