PWM as a Low Cost Method for the Analog Control of MEMS Devices

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2019
Source ID
10.1109/jmems.2019.2891205

Entities

People

  • Alexander Stange
  • Corey Pollock
  • D. J. Bishop
  • Lawrence Barrett
  • Pablo G. del Corro
  • Thomas G. Bifano

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation