Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 01, 2019
- Source ID
- 10.1109/jmems.2019.2892708
Entities
People
- Ming-Huang Li
- Ruochen Lu
- Songbin Gong
- Tomás Manzaneque
- Yansong Yang
Organizations
- Defense Advanced Research Projects Agency