Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2019
Source ID
10.1109/jmems.2019.2900761

Entities

People

  • Anne L. Alter
  • David B. Heinz
  • Dongsuk D. Shin
  • Eldwin J. Ng
  • Ian B. Flader
  • Kenneth E. Goodson
  • Lizmarie Comenencia Ortiz
  • Thomas W. Kenny
  • Woosung Park
  • Yunhan Chen
  • Yushi Yang

Organizations

  • Defense Advanced Research Projects Agency