Aluminum Nitride Lamb Wave Delay Lines With Sub-6 dB Insertion Loss

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2019
Source ID
10.1109/jmems.2019.2919031

Entities

People

  • Michael Breen
  • Ruochen Lu
  • Shibin Zhang
  • Songbin Gong
  • Steffen Link

Organizations

  • Defense Advanced Research Projects Agency