Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM Resonators
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2019
- Source ID
- 10.1109/jmems.2019.2936843
Entities
People
- David B. Heinz
- Gabrielle D. Vukasin
- Hyo Jin K Kim
- Hyun-Keun Kwon
- James M. L. Miller
- Nicholas E. Bousse
- Thomas W. Kenny
Organizations
- Defense Advanced Research Projects Agency
- National Science Foundation