Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2019
- Source ID
- 10.1109/jmems.2019.2945713
Entities
People
- Andrei M. Shkel
- Mohammad H. Asadian
- Yusheng Wang
Organizations
- Defense Advanced Research Projects Agency