Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2019
Source ID
10.1109/jmems.2019.2945713

Entities

People

  • Andrei M. Shkel
  • Mohammad H. Asadian
  • Yusheng Wang

Organizations

  • Defense Advanced Research Projects Agency