Impact of Frequency Mismatch on the Quality Factor of Large Arrays of X-Cut Lithium Niobate MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2020
Source ID
10.1109/jmems.2020.2965957

Entities

People

  • Abhay Kochhar
  • Gabriel Vidal-Álvarez
  • Gianluca Piazza
  • Luca Colombo

Organizations

  • Defense Advanced Research Projects Agency