High $Q$ Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 01, 2020
- Source ID
- 10.1109/jmems.2020.2967784
Entities
People
- Ruochen Lu
- Songbin Gong
- Yansong Yang