Aluminum Nitride Combined Overtone Resonators for the 5G High Frequency Bands
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 01, 2020
- Source ID
- 10.1109/jmems.2020.2975557
Entities
People
- Guofeng Chen
- Matteo Rinaldi
Organizations
- Defense Advanced Research Projects Agency