Fabrication of 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on Insulating Substrates With Through-Wafer Interconnects Using Sacrificial Release Process
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 01, 2020
- Source ID
- 10.1109/jmems.2020.2990069
Entities
People
- Feysel Yalçın Yamaner
- Oluwafemi Joel Adelegan
- Omer Oralkan
- Xiao Zhang
- Zachary A. Coutant
Organizations
- Defense Advanced Research Projects Agency
- National Institutes of Health
- National Science Foundation