Piezoelectric RF MEMS Switches on Si-on-Sapphire Substrates

Document Details

Document Type: Pub Defense Publication
Publication Date: Oct 01, 2020
Source ID: 10.1109/jmems.2020.3008201

Entities

People

Jeffrey S. Pulskamp
Robert R. Benoit
Ronald G. Polcawich
Ryan Q. Rudy

Organizations

United States Army Aeromedical Research Lab